Heat is energy. Cheap, compact and reliable devices capable of a direct
conversion of heat into electrical power will have a strong impact on
the field of the green energy harvesting.
Pennelli Giovanni.
Pennelli Giovanni. |
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Devices based on large arrays of silicon nanowires and nanomembranes for thermal to
electrical energy conversion.
Pennelli G, Totaro M, Piotto M, and Bruschi P.
Pennelli G and Macucci M. |
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Vertical nanowires are fabricated by means of Metal Assisted Silicon Etching.
A top contact is provided by a thick copper layer, deposited by electrodeposition.
E.Dimaggio, G.Pennelli |
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A process for opening very narrow windows through the oxide surrounding the silicon nanowires has been developed. Selective doping is possible. A gate almost all around the nanowire has been fabricated, and JFET characteristics have been measured.
Pennelli G, Totaro M, and Piotto M.
Pennelli G and Piotto M. |
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Processes for the top-down fabrication of devices based on a single (or very few) nanowires have been developed and improved. The reliable fabrication of nanowires as small as 10 nm has been demonstrated.
Pennelli G. and Pellegrini B.
Pennelli G. and Piotto M.
Pennelli G. |
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The hardware and software of an innovative system (pattern generator) for electron beam lithography has been developed and tested. The system allows the fabrication of features smaller than 10 nm.
Pennelli G.
G PENNELLI, A DANGELO, G BARILLARO, M PIOTTO, and PELLEGRINI B. |
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